发明名称 ELECTRON ANALYSIS APPARATUS WITH HEAT-PROTECTIVE SHIELD MEANS SPACEDLY OVERLYING A SAMPLE SUPPORTING SURFACE
摘要 To enable visual observation and X-ray analysis of a sample irradiated by an electron beam, a heat-protective assembly overlying a sample-supporting surface includes an enclosure with a central window for the electron beam, a surrounding annular window for light rays and a pair of lateral windows for X-rays emanating from the sample. An inner shield has a frustoconical body, with generatrices converging toward the supporting surface, which gives passage to both the light rays and the electron beam while screening an area surrounding the annular light-transmissive window of the enclosure without, however, blocking the passage of the X-rays. A set of deflecting plates for the electron beam is mounted on the inner shield, between its frustoconical body and a diaphragm forming the central window, in a zone between the paths of the light rays and the electron beam.
申请公布号 US3800152(A) 申请公布日期 1974.03.26
申请号 US19710206601 申请日期 1971.12.10
申请人 OFFICE NAT D ETUDES ET DE RECH AEROSPATIALES,FR 发明人 DAIGNE B,FR;GIRARD F,FR
分类号 G01N23/225;H01J37/02;H01J37/20;H01J37/22;H01J37/252;H01J37/28;(IPC1-7):G01N23/22 主分类号 G01N23/225
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