CAPACITOR FOR PREVENTING DETERIORATION OF DIELECTRIC

摘要

PURPOSE: A capacitor is to prevent a deterioration of a dielectric in a subsequent process of a hydrogen atmosphere by interposing a reaction stopping layer between a dielectric and an upper electrode. CONSTITUTION: A contact plug(110) is formed in an insulating layer(100). The contact plug and the insulating layer are exposed by depositing and patterning an interlayer dielectric on the entire surface of the resultant structure. A lower electrode(130) is formed by depositing a platinum group metal on the entire surface of the resultant structure. A dielectric(140) is formed on the lower electrode. The dielectric consists of a ferroelectric material. A reaction stopping layer(150) is formed on the dielectric, thereby improving a height of an electrical interface barrier. An upper electrode(160) is formed on the reaction stopping layer. The upper electrode consists of a platinum group metal or a conductive metal compound. The reaction stopping layer consists of Ta2O5 or Al2O3.