| 摘要 |
PURPOSE: A magnetic spacer for magnetron is provided to minimize quantity of heat transfer from anode to magnetron and to improve efficiency of magnetron by increasing double transfer quantity of magnetic field from upside and downside magnet to upside and downside electrode as securing contact area of upside and downside magnetic spacer and upside and downside magnet, and by forming air layer as isolating space of upside and downside magnet and upside and downside magnetic spacer. CONSTITUTION: An upside magnetic spacer(40) is composed of items as follows; A body is installed on the top of anode(5) and has hole to penetrate A seal(27). A protrusive surface is contacted in surface with upside magnet(13) being protruded in predetermined height toward upside magnet(13) at edge of body. A plain surface is separated from upside magnet(13) and is contacted in surface with A seal(27) as forming flatly between protrusive part and hole. A downside magnetic spacer is composed of items as follows; A body is installed opposite against upside magnetic spacer at the bottom of anode(5) and has hole to penetrate F seal. A protrusive surface is contacted in surface with downside magnet being protruded in predetermined height toward downside magnet at edge of body. A plain surface is separated from downside magnet and is contacted in surface with F seal as forming flatly between protrusive part and hole.
|
