| 摘要 |
PURPOSE: A carrier head with a modified flexible membrane is provided to prevent coagulation and accumulation of slurry and deformation of a baseboard. CONSTITUTION: The carrier head(100) includes a housing(102), a retaining ring(110), and a substrate backing assembly(120) which includes a flexible membrane(122). The volume between the flexible membrane and the housing can define a pressurizable chamber(130). Although unillustrated, the substrate backing assembly can be suspended from a base assembly (rather than the housing), and the base assembly can be connected to the housing by a separate loading chamber that controls the pressure of the retaining ring on the polishing surface. In this case, the volume between the flexible membrane and the base assembly defines the pressurizable chamber(130). In addition, the carrier head can also include other features, such as a gimbal mechanism(which may be considered part of the base assembly), multiple chambers, and multiple flexible membranes.
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