ARRAY SUBSTRATE FOR THIN FILM TRANSISTOR LIQUID CRYSTAL DISPLAY AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: An array substrate for a thin film transistor liquid crystal display(TFT-LCD) and a method for manufacturing the same are to perform a manufacturing process only by using five masks, thereby simplifying the process. CONSTITUTION: The first metal is patterned using the first mask to form a gate line(113) including a gate electrode and a gate pad(114). A transparent oxide metal is deposited on the entire structure. The transparent oxide metal is patterned using the second mask to form a transparent metal pattern(116) on the upper portion of the gate pad. The first insulating layer, an intrinsic semiconductor layer, an impurity semiconductor layer and a conductive metal layer are deposited in the order named on the entire structure. The intrinsic semiconductor layer and the impurity semiconductor layer are patterned using the third mask to form a source line(115) including a source/drain region and a source pad(117). A transparent metal layer is deposited on the entire structure and is patterned using the fourth mask to form a source electrode and a drain electrode and a pixel electrode extending from the drain electrode.