| 摘要 |
PURPOSE: A method for multi-managing a bake plate of a spinner is provided to reduce an input error and inconvenience caused by inputting a temperature value when a real process temperature is changed, by beforehand measuring and inputting a plurality of offset values regarding a plurality of target temperature values. CONSTITUTION: A registration place for a plurality of temperature values and offset values regarding respective bake module is prepared in a main controller. Pluralities of target temperature value regarding respective bake modules are inputted to the registration place. An offset value, which is a difference between the respective target temperature values and a real temperature, is measured at a time and inputted together with the target temperature value to make a database. A specific temperature value regarding each bake module is selected from the database in performing a real process so that a temperature value and a corresponding offset value are designated.
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