LOAD LOCK CHAMBER OF EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR

摘要

PURPOSE: A load lock chamber of equipment for manufacturing a semiconductor is provided to minimize impact and shake applied to a wafer cassette, by making the wafer cassette maintain a horizontal state when the wafer cassette is loaded/unloaded to/from an elevator. CONSTITUTION: A stage(110) has an opening(112) through which a wafer cassette(140) is inserted/ejected to/from the exterior. An elevator unit(120) has a shaft capable of vertically moving, installed in the stage. A loading/unloading apparatus slides the wafer cassette from the exterior while maintaining its horizontal state, and loads/unloads the wafer cassette to/from the elevator unit while being installed in the elevator unit.