| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing fine particles by which it is possible to control the composition, crystalline structure, shape and size of fine particles of a metallic oxide and also synthesize the monodisperse and dry fine particles of nano size of the metallic oxide well as a method for forming a coating film by which it is possible to synthesize the fine particles, of the metallic oxide, the composition, crystalline structure, shape and size of which are controlled and also perform the process to apply a uniform metallic oxide layer as a coating film on a substrate consecutively following the synthesizing process. SOLUTION: A liquid material which is an aqueous metallic salt solution, a metallic alkoxide alcohol solution or a mixed solution of the former and further, is in a supercritical state, is rapidly heated up until it reaches a hydrothermal reaction temperature and thereby fine particles of a metallic oxide are generated under hydrothermal synthetic reaction. In addition, a supercritical slurrylike liquid containing the fine particles of the metallic oxide with a particle dia. controlled by heating up the fine particles upto the supercritical state, is injected into a powder recovery device 70 from an superheat supercritical nozzle 20. Consequently, the monodisperse and dry fine particles of the metallic oxide are obtained.
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