| 摘要 |
PURPOSE: A substrate for a reflective type micro LCD(liquid crystal display) and a manufacturing method thereof are to increase reflectance of a reflective layer of the micro LCD, thereby enhancing the optical efficiency thereof. CONSTITUTION: On a silicon substrate, a TFT(thin film transistor) is formed comprising a gate electrode, a semiconductor pattern, a source electrode and a drain electrode(11). And, an insulating layer(12) is deposited on the TFT. Thereafter, the insulating layer is patterned to form a contact hole exposing the drain electrode. A barrier metal layer(14) and a tungsten layer(15) are then deposited on the resultant structure and the tungsten layer is planarized to expose the insulating layer. A titanium nitride layer(16) and a titanium layer(17) are sequentially deposited on the resultant structure and then an aluminum layer(18) is deposited on the titanium layer. The titanium layer protects the titanium nitride layer from absorbing light, when the light is incident on the aluminum layer. |
