发明名称 SEMICONDUCTOR DEVICE AND ASSEMBLY METHOD OF THE SAME
摘要 PURPOSE: To prevent a copper pad from being oxidized during processes where a tape is pasted on a wafer and a chip is bonded to a lead frame or the like. CONSTITUTION: This assembly method comprises an anti-oxidizing tape pasting process where an anti-oxidizing tape 2 is pasted on the surface of a wafer 1 where pads are formed of copper or copper alloy, a dicing process where a dicing tape 3 is pasted on the rear of the wafer 1, grooves 4 are provided in the wafer 1 by dicing, and the wafer 1 is divided into semiconductor chips 5 with the anti-oxidizing tape, and a die bonding process where the semiconductor chip 5 with the anti-oxidizing tape 2 is bonded to the lead frame or the like.
申请公布号 KR20010039787(A) 申请公布日期 2001.05.15
申请号 KR20000045206 申请日期 2000.08.04
申请人 KABUSHIKI KAISHA SHINKAWA 发明人 SUGIURA RIKIO
分类号 H01L21/52;H01L21/301;H01L21/60 主分类号 H01L21/52
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