发明名称 Substrate manufacturing plant having minimum footprint skinned lines
摘要 A substrate manufacturing plant comprising a plurality of minimum footprint skinned lines and methods relating to same. Specifically, a plant comprising a plurality of lines each line capable of accomplishing one step of a manufacturing process; the lines arranged in the order of their respective manufacturing steps so as to minimize the time necessary to process a work piece through all the lines; at least one line enclosed in its own environmental enclosure. By utilizing enclosures having the minimum size necessary to enclose and operate a single line or machine and arranging those enclosures in a linear fashion, parts progress linearly through the modules from start to finish without having to pass through a particular module more than once during processing. Because the size required to house a single machine is much smaller than a room designed to house multiple machines and people, control of the environment within the modules is relatively easy and cheap to accomplish.
申请公布号 AU1448101(A) 申请公布日期 2001.05.14
申请号 AU20010014481 申请日期 2000.10.31
申请人 ALLIED-SIGNAL INC. 发明人 RICHARD J. POMMER;RICHARD HAGAN
分类号 H01L21/00;H01L21/677;H05K3/00 主分类号 H01L21/00
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