| 摘要 |
<p>PROBLEM TO BE SOLVED: To more accurately detect the position of the outer periphery of a substrate by limiting unnecessary reflected light from the side face of the substrate. SOLUTION: A substrate positioning device optically detects the outer periphery of a substrate 1 by means of illuminating means 15 and 17 and light receiving means, and positions the substrate based on the detected results of the means. Illuminating angle adjusting means 20, 21, 22, and 23 which adjust the angle of illuminating luminous fluxes from the illuminating means 15 and 17 are provided.</p> |
