PERMEABLE X-RAY TUBE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a permeable X-ray tube device which enhances a long life and a conversion efficiency of an electron beam to X-ray. SOLUTION: A X-ray tube comprising a vacuum enclosure 11 composing the X-ray tube, a X-ray permeable window 12 mounted on an end of the enclosure 11, a metal thin-film forming a X-ray target 13 mounted a vacuum side of the X-ray permeable window 12 and an electron gun 14 generating an electron beam irradiating the X-ray target 13, a film thickness t of the metal thin film being varied depending on a place and a deflecting electrode 16 deflecting the electron beam e is mounted.