OUTPUT CURRENT-CONTROL DEVICE, STAGE DEVICE, PROJECTION ALIGNER, AND DEVICE MANUFACTURED BY THE PROJECTION ALIGNER AND MANUFACTURING METHOD THER DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an output current-control device, where a linear amplifier and a PWM amplifier are efficiently combined, and a stage device and a projection aligner using the output current-control device. SOLUTION: According to an output current, a linear amplifier 105 and a PWM amplifier 104 are used separately, and output current detectors R5 and 107 are used in common with a comparator 106.