发明名称 ACTIVE MATRIX TYPE DISPLAY DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide an active matrix type display device of high reliability. SOLUTION: A silicon nitride film formed on a glass substrate, an active layer formed above the silicon nitride film, a gate electrode formed on the active layer through a gate insulating film, a source electrode connected to the active layer, a silicon nitride film formed on the source electrode, and a pixel electrode which is, formed on the silicon nitride film formed on the source electrode, connected to the active layer, are provided.</p>
申请公布号 JP2001127306(A) 申请公布日期 2001.05.11
申请号 JP20000249149 申请日期 2000.08.21
申请人 SEMICONDUCTOR ENERGY LAB CO LTD;SHARP CORP 发明人 YAMAMOTO YOSHITAKA;SUZAWA HIDEOMI;AWANE KATSUTERU;FUNADA FUMIAKI;YAMAZAKI SHUNPEI
分类号 G02F1/136;G02F1/1368;G09F9/30;H01L21/20;H01L21/336;H01L29/786;(IPC1-7):H01L29/786 主分类号 G02F1/136
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