发明名称 OPTICAL ELEMENT HOLDING METHOD, OPTICAL ELEMENT HOLDING MECHANISM AND EXPOSURE DEVICE UTILIZING OPTICAL ELEMENT GROUP HELD BY OPTICAL ELEMENT HOLDING MECHANISM
摘要 PROBLEM TO BE SOLVED: To provide an optical element holding method and an optical element holding mechanism, capable of suppressing deformation of a holding member for holding an optical element, highly accurately positioning the optical element at a prescribed position and eliminating deformation of the surface shape of the optical element and deterioration of optical characteristics based on it. SOLUTION: In this optical element holding mechanism constituted of a cell 2 for supporting and positioning the outer peripheral part of the optical element 1 and a lens barrel 5 for supporting and positioning the cell 2 at a prescribed location via a spacer 7, the cell 2 is formed of highly rigid ceramics, the reference members 3a-3d of superior machinability, such as brass are joined to a reference part for performing positioning by being abutted against an abutting part (a), the lens barrel 5 and the spacer 7, etc., and a highly rigid structure capable of highly accurate working is attained.
申请公布号 JP2001124968(A) 申请公布日期 2001.05.11
申请号 JP19990301824 申请日期 1999.10.25
申请人 CANON INC 发明人 SUDO YUJI;CHIBA YUJI
分类号 H01L21/027;G02B7/02;G03F7/20;(IPC1-7):G02B7/02 主分类号 H01L21/027
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