| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide the X-ray photo-electric spectrochemical analysis method of an insulator or a high-resistance sample that measures a photo-electron spectrum with electron-ray radiation conditions where the change rate of energy difference among a plurality of arbitrary photo-electron peaks for change in the electron-ray radiation conditions becomes zero in the X-ray photo-electric spectrochemical analysis method of the insulator or the high-resistance sample for simultaneously applying electron rays and monochromatic X rays. SOLUTION: An electrification state on the sample surface of an insulator or a high-resistance sample when XPS is to be measured can be quantitatively evaluated. Based on the result, electron-ray radiation conditions are systematically determined, thus analyzing the insulator or the high-resistance sample by monochromatic X rays under the continuously optimum electron-ray radiation conditions without relying on experience and intuition of a measuring person.</p> |
