| 摘要 |
PROBLEM TO BE SOLVED: To enhance accuracy for detecting angular velocity and make an angular velocity sensor compact. SOLUTION: This method of manufacturing an angular velocity sensor includes a piezoelectric element cutting process, in which a plurality of sheet- shaped piezoelectric elements 73 are cut from a sheet-shaped unimorph piezoelectric element 71 having a polarization direction set to a constant direction, and individual piezoelectric elements 74 are cut from the sheet-shaped piezoelectric elements 73, a vibrator-cutting process in which each of individual piezoelectric elements 74 is cut in a state while being placed on a jig 75, thereby forming tripod tuning-fork vibrations 21 together, an electrode-forming process, in which electrodes are formed on each face of each of columns 23-25 and a base part 36 by plating or vapor deposition, and an electrode-separating process in which a top point of each of columns 23-25 is chamfered, and a leader electrode of the base part 36 is divided, thereby leading out the electrode formed on each of the columns 23-25 to the base part 36. |
