| 摘要 |
PROBLEM TO BE SOLVED: To provide a device wherein a huge polarization and electric spatial double layer unobserved in conventional ferrodielectrics, etc. SOLUTION: In the process for forming by a sputtering method a thin film made of host substances, a gas of containing therein excimer producing elements (rare-gas elements and/or halogen elements) is used as a sputtering gas. Therefore, by these excimer producing elements being doped into the thin film, an excimer is produced in the thin film under an ordinary pressure and temperature to utilize a large polarization and electric spatial double layer emerging correspondingly to this production.
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