| 摘要 |
PROBLEM TO BE SOLVED: To prevent atmospheric components from permeating/penetrating through the wall of a resin piping to avoid contaminating a work due to infiltration of atmospheric components. SOLUTION: This treatment apparatus for treating a work W housed in a treating container 1 in a prescribed gas atmosphere uses a resin piping 11a as a gas feed piping 11 and has an orifice 21 provided downstream of the resin piping 11a, so as to feed gas at a pressure higher than the atmospheric pressure in the resin piping 11a.
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