| 发明名称 |
WAFER PROBER AND CERAMIC SUBSTRATE USED FOR THE SAME |
| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a ceramic substrate having a chuck top conduction layer which can be made thin and has a reduced resistance and excellent adhesion with the ceramic substrate. SOLUTION: This ceramic substrate used for a wafer prober is obtained by forming a conductor layer composed of a plurality of metallic layers.</p> |
| 申请公布号 |
JP2001127123(A) |
申请公布日期 |
2001.05.11 |
| 申请号 |
JP20000248580 |
申请日期 |
2000.08.18 |
| 申请人 |
IBIDEN CO LTD |
发明人 |
ITO ATSUSHI;HIRAMATSU YASUJI;ITO YASUTAKA |
| 分类号 |
G01R31/26;C04B41/88;G01R1/06;G01R31/28;H01L21/66;H01L21/68;H01L21/683;(IPC1-7):H01L21/66 |
主分类号 |
G01R31/26 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
