发明名称 HEAT TREATING CARRIER
摘要 <p>PROBLEM TO BE SOLVED: To provide a heat treating carrier in which a heat treatment is made at a uniform temperature in a state that sheet glass substrates are stacked. SOLUTION: In a heat treating carrier for use in heat treating sheet glass substrates 18, the carrier comprises a base 2; a plurality of support stands 11 which are formed in a rectangular framed manner, and are detachably stacked at a predetermined interval 19 on the base; and a sheet member 14 which is provided at four corner parts of this support stand, and supports movably the four corner parts of the glass substrate.</p>
申请公布号 JP2001127147(A) 申请公布日期 2001.05.11
申请号 JP19990305534 申请日期 1999.10.27
申请人 KANEGAFUCHI CHEM IND CO LTD 发明人 TAZAKI YOSHIO
分类号 H01L21/673;H01L21/68;H01L31/02;(IPC1-7):H01L21/68 主分类号 H01L21/673
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