发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which has a high reliability and a high yield, and a wiring structure which is hard to short-circuit. SOLUTION: In a semiconductor device which is provided, on one main face of a silicon substrate, with a metal wiring containing aluminum as a main structure material, and copper as a dopant, an element restricting deposition of copper is included in the metal wiring layer, or a neighboring film restricting deposition of copper is brought into contact with the metal wiring layer.
申请公布号 JP2001127157(A) 申请公布日期 2001.05.11
申请号 JP19990310641 申请日期 1999.11.01
申请人 HITACHI LTD 发明人 IWASAKI TOMIO;MIURA HIDEO;NAKAJIMA TAKASHI;OTA HIROYUKI;NISHIHARA SHINJI;SAWARA MASASHI
分类号 H01L21/28;H01L21/3205;H01L21/768;H01L23/52;H01L23/532;(IPC1-7):H01L21/768 主分类号 H01L21/28
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