| 摘要 |
PROBLEM TO BE SOLVED: To obtain a planar galvano mirror hardly influenced by external stress and made excellent in mounting performance. SOLUTION: This planar galvano mirror is constituted by mounting a galvano mirror chip on a pedestal base plate, electrically connecting the chip and the pedestal base plate by wire bonding, mounting the pedestal base plate in a state where its wire side turns downward on a base plate having a hole or a groove by fitting a wire loop to the hole or the groove, and fixing a permanent magnet and a yoke on the base plate.
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