OUTPUT CURRENT-CONTROL DEVICE, VIBRATION-ISOLATING DEVICE, PROJECTION ALIGNER, AND DEVICE MANUFACTURED BY THE PROJECTION ALIGNER AND MANUFACTURING METHOD OF THE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an output current-control device having a plurality of channels (current amplifiers) that are not affected by a beat signal, and an accurate vibration-isolation device and a projection aligner using the output current-control device. SOLUTION: This output current-control device has a plurality of sets (221-224) of current amplifiers 202-208 for controlling an output current, based on input signals V1-V4. Each of the current amplifiers 202-208 adopts a PWM system by pulse width modulation control, and a triangular wave signal used for the pulse width modulation of each of the current amplifiers 202-208 is generated by a single triangular wave signal generation circuit 220.