| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a magnetic recording medium having a thin film and high recording density, excellent in wear resistance, sliding characteristics and durability and capable of forming a protective film to which less impurity is adhered. SOLUTION: A non-magnetic base layer and a magnetic layer are formed on a non-magnetic substrate and a carbon-hydrogen based film is film-formed thereon utilizing a mixed gas consisting of an inert gas and a hydrocarbon gas by a plasma CVD method, then 10-30% part of the film thickness from the surface is nitrided and altered to a carbon-hydrogen-nitrogen based film by making nitrogen ions enter the film from the surface of the film. The surface altered film is adopted as the protective film and a liquid lubricant layer is applied and formed on the protective film to obtain the medium, or, the carbon-hydrogen based film is film-formed on the magnetic layer by the plasma CVD method and when 70-90% film thickness to the thickness of the protective film to be film-formed is obtained, 10-30 vol.% nitrogen gas to the hydrocarbon gas is added to the hydrocarbon gas to film-form residual 10-30% part of the film thickness as the carbon-hydrogen-nitrogen based film. The carbon- hydrogen based film/carbon-hydrogen-nitrogen based film is adopted as the protective film and the lubricant layer is applied and formed on the protective film to obtain the medium.
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