| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a semiconductor position detector which comprises a plurality of position detecting element parts, in which the position detecting element parts can be positioned easily and whose constitution can be simplified. SOLUTION: PSD parts 40A, 40B, 40C, 40D comprise light-receiving-face parts 43A, 43B, 43C, 43D, in which conductive layers 42A, 42B, 42C, 42D are formed. First position-signal electrodes 44A, 44B, 44C, 44D and second position- signal electrodes 45A, 45B, 45C, 45D which are used to extract currents which are output respectively from both end parts of the layers 42A, 42B, 42C, 42D according to incident light positions of light, which is incident on the parts 43A, 43B, 43C, 43D are, installed as pairs by sandwiching the parts 43A, 43B, 43C, 43D. The parts 40A, 40B, 40C, 40D are arranged monolithically on a semiconductor substrate in a direction at right angles to position detecting directions in the parts 40A, 40B, 40C, 40D.</p> |
