发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To solve the problem that resin spreads up to an undesired region when it is irradiated with plasma in order to enhance adhesion. SOLUTION: In a semiconductor device comprising a semiconductor pellet and a wiring board connected electrically while facing each other and boded through resin, a region slightly inside of the outer circumference of the wiring board is irradiated with plasma and resin is placed in the plane irradiated with plasma. A plurality of scribing lines on an insulating board are covered with a mask and a region exposed to the mask opening, including the conductive pads on the wiring board, is irradiated with plasma.
申请公布号 JP2001127085(A) 申请公布日期 2001.05.11
申请号 JP19990303332 申请日期 1999.10.26
申请人 NEC KANSAI LTD 发明人 HOTTA HIROFUMI
分类号 H01L21/56;B29C39/10;H01L21/301;(IPC1-7):H01L21/56 主分类号 H01L21/56
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