| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean room which uniformly controls the degree of cleanness and temperature distribution even when, in a wide clean room, distribution of dusting and heat generation occurs and the distribution is fluctuated, and in which an amount of circulation air by a small air-conditioner is enough. SOLUTION: An air temperature is reduced to a value not reaching, for example, a dew point temperature by a dry coil 92. This air temperature is lower compared with a conventional temperature and air is individually discharged to each area of a clean area through a filter 70 by a fan 72 at a clean zone unit 58. Then the heating load of a manufacturing device in a given area is lower compared with that in other area than the given area, air in the area is returned to a chamber for an individual area by a short-circuit air supply means situated at each area of the given area. This constitution increases the temperature of clean air supplied from a clean zone unit 58 to a value higher than that at other area than a given area and equalizes temperature distribution in a clean area by an amount of circulation air lower than a conventional amount. |
