| 摘要 |
PROBLEM TO BE SOLVED: To easily and accurately detect a mark formed on an object. SOLUTION: An extraction unit 31 extracts a candidate pattern for a mark signal pattern from observation signals obtained from observation results, and a first arithmetic unit 32 obtains a feature quantity corresponding to the features of a mark at least by every feature thereof for the extracted candidate pattern. When a plurality of candidate patterns are extracted, a second arithmetic unit 33 obtains a converted dimensionlessly and normalized specified quantity reflecting the feature quantity difference between two candidate patterns under comparison for each feature. Based on such a specified quantity, the difference in the likelihood of 'mark signal pattern' between the candidate patterns is evaluated, and the mark signal pattern is identified, so as to detect the mark. |
