| 摘要 |
<p>A tester for checking the soundness of a wafer-transporting robot that horizontally transports a substrate such as a semiconductor wafer placed on blades. The tester, used advantageously with a multiple-chamber semiconductor-manufacturing device, includes noncontact distance sensors for measuring vertical distance. Assuming that a reference plane is defined as the upper surface of a cassette stage provided in a load lock chamber of a semiconductor-manufacturing device, the distance sensors of the tester measure the vertical distance between the horizontal reference surface and the robot blades that move above the reference surface. The measurements may indicate warpage of and irregular motions of the blades.</p> |
