发明名称 TIME BASE COMPRISING AN INTEGRATED MICROMECHANICAL RING RESONATOR
摘要 <p>There is described a time base comprising a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to this oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator (4) supported above a substrate (2) and adapted to oscillate around an axis of rotation (O) substantially perpendicular to the substrate. The ring resonator comprises a central post (5) extending from the substrate along the axis of rotation, and a free-standing oscillating structure (6) including an outer ring (60) coaxial with the axis of rotation, and a plurality of spring elements (62) disposed symmetrically around the central post and connecting the outer ring to the central post.</p>
申请公布号 WO2001033711(A1) 申请公布日期 2001.05.10
申请号 CH2000000583 申请日期 2000.11.01
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