| 摘要 |
The present invention relates to a method and to an arrangement for producing ceramic precision elements, such as small building elements for electronic, optoelectronic or mechanical constructions. The invention also relates to a small building element produced in accordance with the method, and to said arrangement, where the measurement accuracy achieved with the building elements produced will lie in the sub-micron range. Structures in ceramic carriers have hitherto been limited to holes formed in carriers and later used to form vias. By varying the force at which a piston presses a ceramic material against a nickel shim/template while baking plastic ceramic material to a solid or firm state, it is possible in the manufacture of ceramic precision elements, such as small ceramic building elements, to provide said elements with complicated geometrical structures in three dimensions copied from a pattern on the nickel shim/template. |
