HIGH ASPECT RATIO PATTERNING OF GLASS FILM

摘要

A relatively facile, inexpensive method for patterning a layer of glass or a substrate involves patterning a seed material containing a nucleating agent adjacent a layer of thermally-crystallizable glass and heat treating the see d material and the layer of thermally-crystallizable glass to induce highly oriented crystal growth from the seed material through the thickness of the thermally-crystallizable glass layer at selected portions thereof. After the heat treatment, the layer of thermally-crystallizable glass is converted int o a desired pattern of glass surrounded by crystalline material. The crystalli ne material is removed with an etchant to leave a desired glass pattern.