BATCH FABRICATION OF ELECTRODES

摘要

According to the present invention, there is provided a process for fabricating micro electrodes (10) by placing electrodes (10) in a vacuum chamber, purging the chamber of contaminated gases, flowing chlorine gas into the chamber and exciting ionized plasma into the chlorine gas, causing Cl<-> ions to form, accelerating these ions toward the surface where they react with the metal, thereby forming a metal salt on the surface of the electrodes (10). Also provided is an electrode made by placing the electrode in a vacuum chamber, purging the chamber of contaminants, gases, flow in chlorine gas into the chamber and exciting ionized plasma in the chlorine gas, causing Cl<-> ions to form, accelerating these ions toward the surface where they react with the metal, thereby forming a metal salt on the surface of the electrodes (10).