COATING METHOD AND COATING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a coating method and coating apparatus capable of stabiliz ing the coating quantity in a rot when a paste supplied to a storage tank is supplied to a head and applied to a substrate. SOLUTION: The discharge quantity of a liquid sending pump 12 is restricted based on the volume of a paste L or the flow rate or the weight of the paste L is measured and the measured value is used for correction of the application conditions for the next time, so that the paste L supplied to the storage tank 11 can applied in an approximately constant quantity to every substrate from the beginning to the finishing.