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发明名称
摘要
申请公布号
JP3164248(B2)
申请公布日期
2001.05.08
申请号
JP19920177427
申请日期
1992.06.11
申请人
发明人
分类号
H01L21/205;C23C16/458;C23C16/46;C30B25/10;C30B31/12;H01L21/00;H01L21/22;H01L21/324;(IPC1-7):H01L21/22
主分类号
H01L21/205
代理机构
代理人
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地址
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