| 摘要 |
PROBLEM TO BE SOLVED: To efficiently perform the disproportionation reaction of hydrohalogenated silane by developing a catalyst having high catalytic activity. SOLUTION: The disproportionation reaction product of the silane compound is manufactured by using the catalyst composed of at least one metal or metal oxide selected from chromium, molybdenum, tungsten, nickel, platinum and fringing hydrohalogenated silane such as trichlorosilane into contact with the catalyst to cause the disproportionation reaction. |
