| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a laser working apparatus with a shape inspecting function for monitoring the shape of a working trace through in-line, and the result is reflected in a working condition. SOLUTION: A laser working apparatus 1 is provided with a working table 2 formed so as to be movable in a horizontal surface for placing a substrate 5 to be worked, a laser working head 3, and a measuring part 4 fixed to the laser working head 3 and formed so as to be vertically movable with the laser working head 3. Then, the measuring part 4 detects the position and cross-sectional shape of a hole formed on the substrate 5. Thus, it is possible to confirm the cross-sectional shape of the hole formed on the substrate 5 without removing the substrate 5 from the working table 2 when the hole working by the laser working head 3 is finished. That is, it is possible to confirm the depth of the worked hole through in-line.</p> |
