| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an encoder-type static pressure gas bearing device capable of rotating at a high speed with high accuracy with superior productivity. SOLUTION: In this static pressure gas bearing device, a spindle 2 is rotatably supported by a radial bearing part 3 and a thrust bearing part 4 respectively formed by static pressure gas bearing. Rough surface parts 10b and smooth surface parts 10a relatively having different surface roughness are arranged in the circumferential direction around a center of the spindle 2 in lattice on the surface of the spindle 2. An optical sensor 11 is mounted for detecting the lattice 10. The lattice 10 is defined by, for example, the laser.</p> |
