| 摘要 |
PROBLEM TO BE SOLVED: To obtain a chemical amplification type resist material having high resolution. SOLUTION: This onium salt is represented by general formula (1) [wherein R1 is a 1-10C stratght-chain, brunched or cyclic substituted or unsubstituted alkyl group or 6-14C substituted or unsubstituted aryl group; R2 which may be the same or different and denotes hydrogen atom, a 1-6C straight-chain, branched or cyclic substituted or unsubstituted alkyl group; (p) is an integer of 1-5 and (q) is an integer of 0-4 and p+q=5; R3 which may be the same or different and denotes a 1-10C straight-chain, branched or cyclic substituted or unsubstituted alkyl group or a 6-14C substituted or unsubstituted aryl group; M is sulfur atom or iodine atom and when is sulfur atom, (a) is 3 and when M is iodine atom, (a) is 2]. |
