| 摘要 |
PROBLEM TO BE SOLVED: To improve the durability and stability of spherical surface accuracy of a diamond pellet plate of a combined tool for forming the polishing spherical surface of a polishing plate with a urethane pad stuck thereto, and to form the surface of the urethane pad in uniform spherical surface accuracy. SOLUTION: In forming a polishing spherical surface 6 of a urethane pad 2 stuck to a polishing plate 1 used for polishing an optical element, by an Oscar type polishing machine using the combined tool 5 to which a diamond pellet plate 4 sintered with diamond abrasive grain and metallic material as main components is bonded, the diamond pellet plate 4 is made to abut on the urethane pad 2 of the polishing plate 1 at an angle of inclinationθ2 of 10%-30% to a half open angleθ1 of the polishing plate 1, and the diamond pellet plate 4 is put in swinging motion in a range of 20%-30% to the half open angleθ1 of the polishing plate 1. The urethane pad 2 can thereby be formed in a uniform polishing spherical surface, and the durability of spherical surface accuracy of the diamond pellet plate 4 can be obtained.
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