Analysis of alkali elements in insulators using secondary ion mass spectrometry

摘要

A method for utilizing secondary ion mass spectrometry (SIMS) analysis allows for the accurate determination of alkali elements in insulator materials by controlling the penetration depth of an electron beam used for charge neutralization so as to minimize the movement of alkali elements in the insulator. The method can be employed in connection with both magnetic sector SIMS instruments and quadrupole SIMS instruments.