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摘要
申请公布号
JP3163815(B2)
申请公布日期
2001.05.08
申请号
JP19930008806
申请日期
1993.01.22
申请人
发明人
分类号
H01L29/74;H01L27/04;H01L29/749;H01L29/78;(IPC1-7):H01L29/749
主分类号
H01L29/74
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