| 摘要 |
A recording original disc (18) for optical discs is manufactured by the following steps: a first step for forming a lower layer (12), an intermediate layer (14) and an upper layer (16) of photoresist on the surface of a substrate (10), a second step for exposing the upper layer (16) to light to form a pattern corresponding to recording information on the upper layer (16) and developing the upper layer (16), a third step for etching the intermediate layer (14) while using the upper layer (16) which has been exposed to light and developed in the second step, a fourth step for etching the lower layer (12) while using as a mask the intermediate layer (14) etched in the third step, and a fifth step for removing the residual intermediate layer. An intermediate step for applying far ultraviolet radiation to the upper layer (16) and then subjecting the upper layer (16) to a heat treatment. Representing the thickness of the intermediate layer (14) and the thickness of the upper layer (16) formed in the first step by D and d respectively, and representing the etching ratio of the intermediate layer (14) to the upper layer (16) by n, the relationship: D (n x d)<= is achieved. The etching ratio of the lower layer (12) to the intermediate layer (14) in the fourth step is set to 10 or more.
|
