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发明名称
摘要
申请公布号
JP3164602(B2)
申请公布日期
2001.05.08
申请号
JP19910162381
申请日期
1991.06.07
申请人
发明人
分类号
H01L27/12;H01L21/28;H01L21/336;H01L27/146;H01L29/78;H01L29/786;(IPC1-7):H01L27/146
主分类号
H01L27/12
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