发明名称 Flexible mount for a mechanism
摘要 Disclosed are techniques and apparatus for flexibly mounting a mechanism. The embodiments describe a flexible mount that is at once tolerant of misalignment, shock resistant, insensitive to rotational orientation, compact, and failure resistant. A mechanism is rigidly attached to a retainer that interlocks with a stationary housing and confines and compresses annular resilient members. The methods may in particular apply to the mounting of hydraulic and pneumatic cylinders for actuation of a shutter assembly in an optical system. In addition the techniques can apply to the flexible mounting of other mechanisms incorporating movable members having axes of symmetry, including push rods and rotating shafts.
申请公布号 US6227100(B1) 申请公布日期 2001.05.08
申请号 US19990256748 申请日期 1999.02.24
申请人 CYMER, INC. 发明人 THOMPSON PAUL S.
分类号 G02B7/00;(IPC1-7):F01B29/00 主分类号 G02B7/00
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