| 摘要 |
PURPOSE: A method for heat-treating a high coercive force magnetic thin-film is provided to reduce a temperature and a time for post-heat treatment. CONSTITUTION: A magnetic thin film is post-heat treated at a temperature over a non-ordered/ordered deformation temperature in an oxide plus argon atmospheric furnace having an oxygen rate 1-100% at atmospheric pressure. As oxygen is added into the heat treatment atmospheric furnace when conducting the post-heat treatment for deformation into an ordered organization of an FePt or a CoPt magnetic thin film, a speed of deformation becomes faster. This phenomenon allows the oxygen included in the atmospheric furnace to be spread to a surface or a boundary surface of the magnetic thin film and an oxide is precipitated at the surface or the boundary surface portions. The oxide acts as a core for causing the ordered/non-ordered deformation of the magnetic thin film, promotes a generation of ordered shape and reduces the time for heat treatment. Besides, when the oxygen is added to the heat treatment atmospheric furnace when post-heat treating the FePt or CoPt magnetic thin film, the temperature for deformation is decreased. In case of the FePt magnetic thin film, the deformation is created at a post-heat treatment temperature of 300 degrees. However, if the oxygen is not added, the deformation does not generated. This phenomenon is caused by the aforementioned oxide precipitation.
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