WAFER COUNTING DEVICE AND SEMICONDUCTOR ARRANGEMENT EQUIPMENT HAVING THE SAME

摘要

PURPOSE: A wafer counting device and a semiconductor arrangement equipment having the same are provided to measure correctly and easily the amount of loaded wafers without using a device such as an optical sensor. CONSTITUTION: A wafer counting device comprises a carrier support portion(70), a weight measurement portion, and an amount determination portion. The carrier support portion(70) supports a carrier for receiving a plurality of wafer. The weight measurement portion measures the total weight of the carrier located on the carrier support portion(70). The amount determination portion determines the amount of the wafers within the carrier on the basis of the measured weight from the weight measurement portion.