| 摘要 |
PURPOSE: A door switching device in a pod for wafer is provided to perform correctly a switching operation when a door of a pod is opened or shut. CONSTITUTION: A door switching device in a pod for wafer comprises a key and a door support bar(326a,326b). The key is installed at one side of an opener(300). The key operates a door-locking device installed at a door. The door support bar is installed at one side of the opener(300). The door support bar is inserted into a support bar insertion hole installed at the door. The door support bar(326a,326b) has two or more elastic members. A frictional force is generated between the elastic members and an inner circumference face of the support bar insertion hole when the door support bar(326a,326b) is inserted into the support bar insertion hole.
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